This tender with title ОКР "Разработка и изготовление промышленно-ориентированного технологического комплекса плазмохимического травления (ПХТ) кластерного типа с технологическими модулями: - модуль травления металлов; - модуль ICP RIE анизотропного высокоселективного травления кремния и поликремния; - модуль удаления фоторезистивных и полимерных слоев; - модуль травления высокоаспектных диэлектрических структур и роботизированной системой транспортирования пластин с использованием FOUP контейнеров", шифр "Кластер ПХТ 65" -- ROC "Development and manufacture of an industrially-oriented technological complex for plasma-chemical etching (PCT) of cluster type with technological modules: - metal etching module; - ICP RIE module for anisotropic highly selective etching of silicon and polysilicon; - module for removing photoresistive and polymer layers; - etching module for high-aspect dielectric structures and a robotic system for transporting plates using FOUP containers ", code" Cluster PCT 65 " has been published on Bidding Source portal dated 29 Sep 2021 for the country of Russia. It has been categorized on Large containers & Primary-form of vinyl polymers & Structural steel erection work & Structures and parts of structures & Structural steel erection work for structures & Structural steel erection work for buildings & Primary-form polymers of vinyl acetate & Tanks, reservoirs, containers and pressure vessels & Primary-form acrylic polymers & Primary-form polymers of ethylene & Primary-form polymers of styrene & Primary-form polymers of propylene & Structural steelworks. For similar tenders you can see tenders mentioned below of this page.
ROC "Development and manufacture of an industrially-oriented technological complex for plasma-chemical etching (PCT) of cluster type with technological modules: - metal etching module; - ICP RIE module for anisotropic highly selective etching of silicon and polysilicon; - module for removing photoresistive and polymer layers; - etching module for high-aspect dielectric structures and a robotic system for transporting plates using FOUP containers ", code" Cluster PCT 65 "
General Information
ROC "Development and manufacture of an industrially-oriented technological complex for plasma-chemical etching (PCT) of cluster type with technological modules: - metal etching module; - ICP RIE module for anisotropic highly selective etching of silicon and polysilicon; - module for removing photoresistive and polymer layers; - etching module for high-aspect dielectric structures and a robotic system for transporting plates using FOUP containers ", code" Cluster PCT 65 "
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